For citations:
Zamiatina O.V., Eganova E.M. STUDY OF SOLID-STATE PORE IN SILICON NITRIDE MEMBRANE BY MEANS OF NUMERICAL MODELING. Vestnik natsional'nogo issledovatel'skogo yadernogo universiteta "MIFI". 2024;13(6):422-429. (In Russ.) https://doi.org/10.26583/vestnik.2024.6.6. EDN: SGDDSR